Low Quality High Quality Hexafluoroethane

Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth. Hexafluoroethane Quality Specification：  Items 单位 Unit  Indexs C2F6 Vol.% ≥99.999 O2+Ar Vol.ppm ＜1 N2 Vol.ppm ＜5 CO Vol.ppm ＜0.5 CO2…